Issued Patents 2024
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12108499 | Ceramic heater with shaft | Hiroshi Takebayashi, Tatsuya KUNO | 2024-10-01 |
| 12087613 | Wafer placement table and method of manufacturing the same | Hiroshi Takebayashi, Tatsuya KUNO | 2024-09-10 |
| 12027385 | Ceramic heater | Yuji AKATSUKA, Hiroshi Takebayashi, Takahiro Ando | 2024-07-02 |
| 11951583 | Electrostatic chuck with high insulation performance and electrostatic attraction force | Hiroshi Takebayashi, Tatsuya KUNO | 2024-04-09 |
| 11948825 | Wafer placement table | Hiroshi Takebayashi, Tatsuya KUNO | 2024-04-02 |