Issued Patents 2024
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12176186 | Wafer placement table | Seiya INOUE | 2024-12-24 |
| 12131891 | Wafer placement table | Seiya INOUE | 2024-10-29 |
| 12108499 | Ceramic heater with shaft | Kenichiro AIKAWA, Hiroshi Takebayashi | 2024-10-01 |
| 12106994 | Electrostatic chuck | — | 2024-10-01 |
| 12087613 | Wafer placement table and method of manufacturing the same | Hiroshi Takebayashi, Kenichiro AIKAWA | 2024-09-10 |
| 12087609 | Wafer placement table | Takumi Wakisaka | 2024-09-10 |
| 12087610 | Member for semiconductor manufacturing apparatus | Seiya INOUE | 2024-09-10 |
| 12040165 | Wafer placement table | Seiya INOUE, Hiroshi Takebayashi | 2024-07-16 |
| 11951583 | Electrostatic chuck with high insulation performance and electrostatic attraction force | Hiroshi Takebayashi, Kenichiro AIKAWA | 2024-04-09 |
| 11948825 | Wafer placement table | Kenichiro AIKAWA, Hiroshi Takebayashi | 2024-04-02 |