Issued Patents 2024
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12068180 | Advanced temperature monitoring system and methods for semiconductor manufacture productivity | Xuesong Lu, Lin Zhang, Jang Seok OH, Balaji Pasupathy, Michael W. Johnson | 2024-08-20 |
| 12013291 | Advanced temperature monitoring system with expandable modular layout design | Shuran Sheng, Lin Zhang | 2024-06-18 |
| 11866821 | Substrate support cover for high-temperature corrosive environment | Shuran Sheng, Lin Zhang, Jiyong Huang, Stanley Wu, Mahesh Adinath Kanawade +3 more | 2024-01-09 |