Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12170221 | Apparatus for processing substrate | Won Woo Jung, Young Rok Kim, Yoo Seong Kim, Chul Joo HWANG | 2024-12-17 |
| 12154769 | Window for plasma OES diagnosis, and plasma apparatus using same | Kang Lee, Yong-Sup Choi, Young Woo Kim | 2024-11-26 |
| 12024774 | Apparatus for supplying gas and apparatus for processing substrate using the same | Ki Bum Kim, Yun Gyu HA, Il Hyung Cho, Chul Joo HWANG | 2024-07-02 |