Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12165023 | Measuring local CD uniformity using scatterometry and machine learning | Dexin Kong, Aron Cepler, Marjorie Cheng, Roy Koret, Igor Turovets | 2024-12-10 |
| 12020970 | Metrology data correction | — | 2024-06-25 |