Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12146125 | Use of compositions comprising a solvent mixture for avoiding pattern collapse when treating patterned materials with line-space dimensions of 50 nm or below | Marcel Brill, Yeni Burk, Frank Oliver Heinrich Pirrung, Lothar Alexander Engelbrecht, Szilard Csihony +3 more | 2024-11-19 |
| 11970647 | Composition, its use and a process for selectively etching silicon-germanium material | Francisco Javier Lopez Villanueva, Yeni Burk, Jan Ole Mueller, Marcel Brill, Patrick Wilke +2 more | 2024-04-30 |