Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11970647 | Composition, its use and a process for selectively etching silicon-germanium material | Yeni Burk, Daniel LOEFFLER, Jan Ole Mueller, Marcel Brill, Patrick Wilke +2 more | 2024-04-30 |