Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12147163 | Method for correcting critical dimension measurements of lithographic tool | Hsin-Yu Hsieh, Kuan-Ying Lai, Chien-Hao Chen, Chun-Chi Yu | 2024-11-19 |
| 12106962 | Patterning method and overlay measurement method | Yi-Jing Wang, Chia-Chang Hsu, Chien-Hao Chen, Chun-Chi Yu | 2024-10-01 |