Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12032303 | EUV wafer defect improvement and method of collecting nonconductive particles | Li-Jui Chen, Chia-Yu Lee | 2024-07-09 |
| 11965755 | Triboelectric sensor and control system | Chengkuo Lee, Qiongfeng SHI | 2024-04-23 |