Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12032303 | EUV wafer defect improvement and method of collecting nonconductive particles | Tao Chen, Li-Jui Chen | 2024-07-09 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12032303 | EUV wafer defect improvement and method of collecting nonconductive particles | Tao Chen, Li-Jui Chen | 2024-07-09 |