Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12092957 | Radiation-sensitive resin composition, method for forming resist pattern and compound | Kazuya KIRIYAMA, Katsuaki NISHIKORI, Takuhiro Taniguchi, Ken MARUYAMA | 2024-09-17 |
| 11966160 | Radiation-sensitive resin composition and method for forming pattern | — | 2024-04-23 |