Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12025569 | Defect inspection device and inspection method, and optical module | Toshifumi Honda, Shunichi Matsumoto, Eiji Arima | 2024-07-02 |
| 11982631 | Defect detection device, defect detection method, and defect observation apparatus including defect detection device | Yuko Otani, Kazuo Aoki, Shunichi Matsumoto | 2024-05-14 |