Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12180611 | Methods of forming silicon carbide coated base substrates at multiple temperatures | Yen Lin Leow, Xinning LUAN, Hui-Chi Chen, Kirk Allen FISHER | 2024-12-31 |
| 12071686 | Liner assemblies for substrate processing systems | Arash Abedijaberi | 2024-08-27 |
| 11885019 | Susceptor with ring to limit backside deposition | Mark Hawkins, Matthew G. Goodman | 2024-01-30 |