Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12185449 | EUV light generation apparatus, electronic device manufacturing method, and inspection method | Fumio Iwamoto | 2024-12-31 |
| 12150233 | Target substance replenishment device, extreme ultraviolet light generation apparatus, and electronic device manufacturing method | Hideki Shishiba | 2024-11-19 |