Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12150233 | Target substance replenishment device, extreme ultraviolet light generation apparatus, and electronic device manufacturing method | Yutaka Shiraishi | 2024-11-19 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12150233 | Target substance replenishment device, extreme ultraviolet light generation apparatus, and electronic device manufacturing method | Yutaka Shiraishi | 2024-11-19 |