Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12032288 | Actinic ray-sensitive or radiation-sensitive resin composition, resist film, pattern forming method, and method for manufacturing electronic device | Minoru Uemura, Akihiro Kaneko, Akiyoshi GOTO, Kei Yamamoto | 2024-07-09 |
| 12007688 | Actinic ray-sensitive or radiation-sensitive resin composition, resist film, pattern forming method, method for manufacturing electronic device, and resin | Daisuke ASAKAWA, Akiyoshi GOTO, Takashi Kawashima, Yasufumi Oishi, Keita Kato | 2024-06-11 |
| 11886113 | Actinic ray-sensitive or radiation-sensitive resin composition, resist film, pattern forming method, and method for manufacturing electronic device | Keita Kato, Michihiro SHIRAKAWA, Akiyoshi GOTO, Takashi Kawashima | 2024-01-30 |