Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12007688 | Actinic ray-sensitive or radiation-sensitive resin composition, resist film, pattern forming method, method for manufacturing electronic device, and resin | Daisuke ASAKAWA, Akiyoshi GOTO, Masafumi KOJIMA, Takashi Kawashima, Yasufumi Oishi | 2024-06-11 |
| 11886113 | Actinic ray-sensitive or radiation-sensitive resin composition, resist film, pattern forming method, and method for manufacturing electronic device | Michihiro SHIRAKAWA, Akiyoshi GOTO, Takashi Kawashima, Masafumi KOJIMA | 2024-01-30 |