Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12038689 | Actinic ray-sensitive or radiation-sensitive resin composition, resist film, pattern forming method, and method for manufacturing electronic device | Akihiro Kaneko, Takashi Kawashima, Akiyoshi GOTO | 2024-07-16 |
| 12001140 | Actinic ray-sensitive or radiation-sensitive resin composition, resist film, pattern forming method, and method for manufacturing electronic device | Akihiro Kaneko, Takashi Kawashima, Akiyoshi GOTO | 2024-06-04 |
| 11953829 | Actinic ray-sensitive or radiation-sensitive resin composition, resist film, pattern forming method, and method for manufacturing electronic device | Takashi Kawashima, Tomotaka Tsuchimura, Hajime Furutani, Michihiro SHIRAKAWA | 2024-04-09 |