Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11953829 | Actinic ray-sensitive or radiation-sensitive resin composition, resist film, pattern forming method, and method for manufacturing electronic device | Kazunari Yagi, Takashi Kawashima, Tomotaka Tsuchimura, Michihiro SHIRAKAWA | 2024-04-09 |