Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11987491 | MEMS actuator element and MEMS actuator array with a plurality of MEMS actuator elements | Peter DÜRR, Andreas Neudert | 2024-05-21 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11987491 | MEMS actuator element and MEMS actuator array with a plurality of MEMS actuator elements | Peter DÜRR, Andreas Neudert | 2024-05-21 |