Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12054384 | MEMS comprising a movable structural element, and MEMS array | Peter Duerr | 2024-08-06 |
| 11987491 | MEMS actuator element and MEMS actuator array with a plurality of MEMS actuator elements | Peter DÜRR, Linda Skatulla | 2024-05-21 |