SC

Shao Hua Chang

EB Ebara: 8 patents #1 of 168Top 1%
Overall (2024): #13,202 of 561,600Top 3%
8
Patents 2024

Issued Patents 2024

Showing 1–8 of 8 patents

Patent #TitleCo-InventorsDate
12180606 Plating apparatus Masaya Seki, Masaki Tomita 2024-12-31
12152311 Wetting method for substrate and plating apparatus Masaya Seki 2024-11-26
12134833 Plating apparatus and cleaning method of contact member of plating apparatus Masaya Seki, Masaki Tomita 2024-11-05
12116687 Powder supply apparatus and plating system Jumpei Fujikata 2024-10-15
12077875 Air bubble removing method of plating apparatus and plating apparatus Kazuhito Tsuji, Masashi Shimoyama 2024-09-03
12054840 Plating apparatus, pre-wet process method, and cleaning process method Masaya Seki 2024-08-06
11906299 Plating apparatus and film thickness measuring method for substrate Masaya Seki, Masaki Tomita 2024-02-20
11891715 Paddle, processing apparatus having the paddle, and method of producing the paddle Yasuyuki Masuda, Yoshitaka Mukaiyama, Masashi Shimoyama, Jumpei Fujikata 2024-02-06