Issued Patents 2024
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12180606 | Plating apparatus | Masaki Tomita, Shao Hua Chang | 2024-12-31 |
| 12152311 | Wetting method for substrate and plating apparatus | Shao Hua Chang | 2024-11-26 |
| 12134833 | Plating apparatus and cleaning method of contact member of plating apparatus | Masaki Tomita, Shao Hua Chang | 2024-11-05 |
| 12076760 | Pre-wet module, deaerated liquid circulation system, and pre-wet method | Mitsutoshi Yahagi, Nobuya YAMADA | 2024-09-03 |
| 12054840 | Plating apparatus, pre-wet process method, and cleaning process method | Shao Hua Chang | 2024-08-06 |
| 11906299 | Plating apparatus and film thickness measuring method for substrate | Masaki Tomita, Shao Hua Chang | 2024-02-20 |