Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12151335 | Monitoring method for chemical mechanical polishing and chemical mechanical polishing device | Xinchun Lu, Tongqing Wang, Qingbo Liang, Haiyang Xu, Rui Tan | 2024-11-26 |