Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12023850 | Position detection apparatus, imprint apparatus, and article manufacturing method | Takafumi Miyaharu | 2024-07-02 |
| 11934098 | Detection apparatus, lithography apparatus, and article manufacturing method | Toshiki Iwai | 2024-03-19 |