Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12153343 | Imprint method, imprint apparatus, and article manufacturing method | Tatsuya Hayashi | 2024-11-26 |
| 12072638 | Exposure apparatus, exposure method, and method of manufacturing article | Kazuki Ota, Yuki Saito, Masaki Imai | 2024-08-27 |
| 12023850 | Position detection apparatus, imprint apparatus, and article manufacturing method | Tomokazu Taki | 2024-07-02 |