Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11972948 | Adhesion layers for EUV lithography | Andrea M. Chacko, Vandana Krishnamurthy, Yichen Liang, Hao-Chun Lee, Stephen Grannemann | 2024-04-30 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11972948 | Adhesion layers for EUV lithography | Andrea M. Chacko, Vandana Krishnamurthy, Yichen Liang, Hao-Chun Lee, Stephen Grannemann | 2024-04-30 |