Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12087608 | Transfer apparatus and processing system | Fei Yu, Gonglin Luo | 2024-09-10 |
| 12009220 | Method for processing workpiece, plasma processing apparatus and semiconductor device | Fei Yu, Junliang Li | 2024-06-11 |