Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12009220 | Method for processing workpiece, plasma processing apparatus and semiconductor device | Fei Yu, Mengyang Xin | 2024-06-11 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12009220 | Method for processing workpiece, plasma processing apparatus and semiconductor device | Fei Yu, Mengyang Xin | 2024-06-11 |