Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12080513 | Cross-talk cancellation in multiple charged-particle beam inspection | Lingling PU, Bo Wang, Zhonghua Dong, Yongxin Wang | 2024-09-03 |
| 12040187 | In-die metrology methods and systems for process control | Lingling PU, Zhong-Wei Chen | 2024-07-16 |
| 11880971 | Inspection method and system | Zhao-Li Zhang, Jack Jau | 2024-01-23 |
| 11861818 | Cascade defect inspection | Zhichao Chen | 2024-01-02 |