Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11860554 | Object positioner, method for correcting the shape of an object, lithographic apparatus, object inspection apparatus, device manufacturing method | Mark Johannes Hermanus Frencken, Oleg Viacheslavovich Voznyi | 2024-01-02 |