Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11860546 | Fluid handling structure for lithographic apparatus | Pepijn Van Den Eijnden, Cornelius Maria Rops, Theodorus Wilhelmus Polet, Floor Lodewijk Keukens, Gheorghe Tanasa +8 more | 2024-01-02 |
| 11860554 | Object positioner, method for correcting the shape of an object, lithographic apparatus, object inspection apparatus, device manufacturing method | Theodorus Marcus Nagtegaal, Oleg Viacheslavovich Voznyi | 2024-01-02 |