Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12140875 | Metrology measurement method and apparatus | Ilse VAN WEPEREN, Han-Kwang Nienhuys | 2024-11-12 |
| 11996267 | Particle beam apparatus, defect repair method, lithographic exposure process and lithographic system | Ruben Cornelis MAAS, Alexey Olegovich POLYAKOV | 2024-05-28 |