Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11996267 | Particle beam apparatus, defect repair method, lithographic exposure process and lithographic system | Ruben Cornelis MAAS, Teis Johan Coenen | 2024-05-28 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11996267 | Particle beam apparatus, defect repair method, lithographic exposure process and lithographic system | Ruben Cornelis MAAS, Teis Johan Coenen | 2024-05-28 |