Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11988307 | Anti-rotation fluid connection | — | 2024-05-21 |
| 11988967 | Target material supply apparatus and method | — | 2024-05-21 |
| 11963285 | Target material control in an EUV light source | Abhiram Govindaraju, David Bessems, Sandeep Rai, Petrus Adrianus Willems, Serkan Kincal +1 more | 2024-04-16 |