Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11963285 | Target material control in an EUV light source | Abhiram Govindaraju, Sandeep Rai, Petrus Adrianus Willems, Serkan Kincal, Joshua Mark Lukens +1 more | 2024-04-16 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11963285 | Target material control in an EUV light source | Abhiram Govindaraju, Sandeep Rai, Petrus Adrianus Willems, Serkan Kincal, Joshua Mark Lukens +1 more | 2024-04-16 |