Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12032305 | Alignment method and associated alignment and lithographic apparatuses | Edo Maria Hulsebos | 2024-07-09 |
| 11966166 | Measurement apparatus and a method for determining a substrate grid | Edo Maria Hulsebos, Henricus Johannes Lambertus Megens, Robert John Socha, Youping Zhang | 2024-04-23 |
| 11927892 | Alignment method and associated alignment and lithographic apparatuses | Edo Maria Hulsebos | 2024-03-12 |
| 11874103 | Measurement apparatus | Junichi KANEHARA, Stefan Carolus Jacobus Antonius Keij, Thomas Augustus Mattaar, Petrus Franciscus Van Gils | 2024-01-16 |