Issued Patents 2024
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12173402 | Method of forming a transition metal containing film on a substrate by a cyclical deposition process, a method for supplying a transition metal halide compound to a reaction chamber, and related vapor deposition apparatus | Timo Hatanpää, Katja Väyrynen, Mikko Ritala | 2024-12-24 |
| 12119220 | Methods for filling a gap feature on a substrate surface and related semiconductor structures | Leo Salmi, Mikko Ritala | 2024-10-15 |
| 12106965 | Methods for forming a metallic film on a substrate by cyclical deposition and related semiconductor device structures | Katja Väyrynen, Mikko Ritala | 2024-10-01 |
| 11959171 | Methods of forming a transition metal containing film on a substrate by a cyclical deposition process | Timo Hatanpää, Katja Väyrynen, Mikko Ritala | 2024-04-16 |
| 11952658 | Cyclic deposition methods for forming metal-containing material and films and structures including the metal-containing material | Katja Väyrynen, Timo Hatanpää, Mikko Ritala | 2024-04-09 |