Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12173402 | Method of forming a transition metal containing film on a substrate by a cyclical deposition process, a method for supplying a transition metal halide compound to a reaction chamber, and related vapor deposition apparatus | Timo Hatanpää, Mikko Ritala, Markku Leskelä | 2024-12-24 |
| 12106965 | Methods for forming a metallic film on a substrate by cyclical deposition and related semiconductor device structures | Mikko Ritala, Markku Leskelä | 2024-10-01 |
| 11959171 | Methods of forming a transition metal containing film on a substrate by a cyclical deposition process | Timo Hatanpää, Mikko Ritala, Markku Leskelä | 2024-04-16 |
| 11952658 | Cyclic deposition methods for forming metal-containing material and films and structures including the metal-containing material | Timo Hatanpää, Mikko Ritala, Markku Leskelä | 2024-04-09 |