Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12107000 | Substrate support assembly and substrate processing device including the same | JaeMin Roh, GunYong Park | 2024-10-01 |
| 11993843 | Substrate processing apparatus | Seung Wook Kim, Won Ki Jeong, Dong Rak Jung, Hong Hyun Kim | 2024-05-28 |
| 11996304 | Substrate processing device | — | 2024-05-28 |