Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12173400 | Substrate processing device | — | 2024-12-24 |
| 12107000 | Substrate support assembly and substrate processing device including the same | JuIll Lee, GunYong Park | 2024-10-01 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12173400 | Substrate processing device | — | 2024-12-24 |
| 12107000 | Substrate support assembly and substrate processing device including the same | JuIll Lee, GunYong Park | 2024-10-01 |