Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12147212 | Diagnostic methods for substrate manufacturing chambers using physics-based models | Venkata Ravishankar Kasibhotla, Tao Zhang, Bala Shyamala Balaji | 2024-11-19 |
| 11961030 | Diagnostic tool to tool matching methods for manufacturing equipment | Sejune Cheon, Jeong Jin Hong, Mikyung Shim, Jinkyeong Lee, Sang Hong Kim | 2024-04-16 |