Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12147212 | Diagnostic methods for substrate manufacturing chambers using physics-based models | Tao Zhang, Xiaoqun Zou, Bala Shyamala Balaji | 2024-11-19 |
| 11894220 | Method and apparatus for controlling a processing reactor | Michael Nichols, Tina Dhekial-Phukan, Ajit Balakrishna, Sanggyum Kim | 2024-02-06 |