Issued Patents 2024
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12134167 | Pad conditioner cleaning system | Shantanu Rajiv Gadgil, Nathan Davis, Michael J. Coughlin, Allen L. D'Ambra | 2024-11-05 |
| 12125728 | Substrate carrier | Fred Eric Ruhland, Vijay D. Parkhe, Daniel Lee Diehl, Mingwei Zhu, Hiroyuki Takahama +1 more | 2024-10-22 |
| 11986925 | Maintenance methods for polishing systems and articles related thereto | Shantanu Rajiv Gadgil, Nathan Davis, Michael J. Coughlin, Allen L. D'Ambra | 2024-05-21 |