Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12068159 | Methods and apparatus for mask patterning debris removal | Karthik Balakrishnan, Jungrae Park, Arunkumar TATTI, Eng Sheng Peh | 2024-08-20 |
| 11871667 | Methods and apparatus for warpage correction | Puay Han Tan, Karrthik Parathithasan, Jun-Liang Su, Fang Jie Lim, Chin Wei Tan +1 more | 2024-01-09 |