Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12068159 | Methods and apparatus for mask patterning debris removal | Karthik Balakrishnan, Jungrae Park, Sriskantharajah Thirunavukarasu, Eng Sheng Peh | 2024-08-20 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12068159 | Methods and apparatus for mask patterning debris removal | Karthik Balakrishnan, Jungrae Park, Sriskantharajah Thirunavukarasu, Eng Sheng Peh | 2024-08-20 |