Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D1053230 | Sputter target for a physical vapor deposition chamber | Jay Min Soh, Mengxue Wu, Palaniappan Chidambaram | 2024-12-03 |
| 12046460 | Programmable electrostatic chuck to enhance aluminum film morphology | Yaoying ZHONG, Bridger Earl HOERNER | 2024-07-23 |
| 12037676 | Programmable ESC to enhance aluminum film morphology | Yaoying ZHONG, Bridger Earl HOERNER | 2024-07-16 |