Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12046460 | Programmable electrostatic chuck to enhance aluminum film morphology | Yaoying ZHONG, Siew Kit Hoi | 2024-07-23 |
| 12037676 | Programmable ESC to enhance aluminum film morphology | Yaoying ZHONG, Siew Kit Hoi | 2024-07-16 |