Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12094709 | Plasma treatment process to densify oxide layers | Jung Chan Lee, Mun Kyu Park, Jun Seok Lee, Euhngi Lee, Kyu-Ha Shim +5 more | 2024-09-17 |
| 12040210 | Multi-pressure bipolar electrostatic chucking | Jian Li, Dmitry A. Dzilno, Juan Carlos Rocha-Alvarez, Paul Brillhart, Akshay Gunaji +6 more | 2024-07-16 |