Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12040210 | Multi-pressure bipolar electrostatic chucking | Jian Li, Dmitry A. Dzilno, Juan Carlos Rocha-Alvarez, Paul Brillhart, Akshay Gunaji +6 more | 2024-07-16 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12040210 | Multi-pressure bipolar electrostatic chucking | Jian Li, Dmitry A. Dzilno, Juan Carlos Rocha-Alvarez, Paul Brillhart, Akshay Gunaji +6 more | 2024-07-16 |